非织造基磁控溅射纳米银薄膜导电性能的研究  

Conductivity of silver-coated non-woven fabric deposited by magnetron sputtering

作　　者：许凤凤[1] 魏取福[1] 孟灵灵[1] 

机构地区：[1]江南大学生态纺织教育部重点实验室,无锡214122

出　　处：《化工新型材料》2012年第6期105-107,共3页New Chemical Materials

基　　金：江苏省自然科学基金(BK2010140)

摘　　要：在室温条件下采用射频磁控溅射在丙纶(PP)、聚乳酸(PLA)熔喷非织造布表面生长纳米银(Ag)薄膜,并且用等离子体预处理样品进行对比。采用扫描电子显微镜(SEM)对其形貌进行表征,采用四探针测试仪对所制备的纳米薄膜的导电性能进行表征。研究溅射时间、孔隙率及孔径分布和等离子处理对非织造基纳米银薄膜的导电性能的影响。实验表明:随着反应溅射时间的增加,薄膜的方块电阻值下降,导电性能增加;孔径大小也影响薄膜的导电性能,随着孔径的增大,薄膜的导电性能降低;等离子体处理对织物表面进行刻蚀,增加了纤维的比表面积,提高了纤维的润湿性能,改善了织物的导电性能。Nanoscale silver functional films were prepared on the surface of non-woven polypropylene fabric and polylactide fabric at room temperature by RF reactive magnetron sputtering process, and compared with plasma pretreat- ment. The fabric were characterized by scanning electron microscope, the conductivity of silver films were characterized by four-point probe tester. The conductivity of silver films were influenced by sputtering time, pore size distribution and plasma pretreatment. The test results showed that with the increasing of reaction time of sputtering, film square resistance was dropped, electric conductivity was increased. The pore size was also influenced by silver films＇ electric property, with the in- creasing of pore size, films＇ electric conductivity was reduced; plasma pretreatment had etched on fabric surface, the fiber surface area was increased, that improved fiber wettability, and improved the performance of the conductivity.

关 键 词：射频磁控溅射 非织造 导电性 纳米银 

分 类 号：TB383.2[一般工业技术—材料科学与工程]