热处理对KTN薄膜结构和形貌的影响  

EFFECT OF HEAT-TREATMENT ON THE STRUCTURE AND MORPHOLOGY OF KTN THIN FILMS

作　　者：王龙海[1] 罗英军 王世敏[1] 黄桂玉[1] 

机构地区：[1]湖北大学压电陶瓷技术研究所,湖北武汉430062

出　　处：《功能材料与器件学报》2000年第1期43-49,共7页Journal of Functional Materials and Devices

基　　金：国家自然科学基金! 5930 2 0 15

摘　　要：:本文用XRD、SEM等分析手段 ,对用Sol -Gel法制备的Gel膜在不同热处理条件下处理后的KTN薄膜进行分析。发现热处理的气氛、升降温速率、烧结温度对薄膜的结构和形貌影响很大 ,并对其的影响进行了分析讨论。在合适的热处理条件下 ,在SrTiO3 ( 1 0 0 ,1 1 1 )衬底上制备出了高取向、晶粒大小均匀、排列紧密。The structure and morphology of KTN thin films derived from Sol-Gel method under different heat-treatment conditions were studied by XRD and SEM. The results indicated that they were influenced heavily by the heating and cooling rate, annealing temperature and atmosphere. The effect of heat treatment was analyzed and discussed, highly oriented perovskite KTN thin films were prepared under optimal conditions on SrTiO 3(100) and (111) substrates.

关 键 词：热处理 钙钛矿结构 表面形貌 钽铌酸钾 

分 类 号：TN304.9[电子电信—物理电子学]