氢气直流放电的等离子体数值模拟研究  

The Numerical Simulation Study on Direct-Current Discharge by Hydrogen Plasma

作　　者：刘竞业[1] 高媛[1] 张明[2] 

机构地区：[1]北京化工大学理学院物理学与电子科学系,北京100029 [2]北京真空电子技术研究所第四研究室,北京100015

出　　处：《真空电子技术》2012年第2期44-46,67,共4页Vacuum Electronics

摘　　要：针对低气压、弱电离条件下的氢气放电,建立了二维直流放电模型,建模中修正了有关文献中边界条件的不足,在阴极处,引入了金属电子溢出功和二次电子发射系数来表征电子与离子密度之间的关系;同时由动理论表征了电子能量的分布,依据双流体理论,以作者所分析确定的主要影响低气压、弱电离条件下氢气放电的11种碰撞反应为基础,进行了模拟计算。得出了迁移率、极间距和最小击穿电压间的对应关系,并将模拟曲线与标准的帕邢曲线进行了对比,得到了吻合的结果。A two-dimensional model of weakly-ionized hydrogen direct-current（DC） discharge in the low pressure was simulated to calculate breakdown voltage of gas gap between two parallel plates.In the model,kinetic theory was used to explain the relation between electron mobility and electric field,and a precise cross section data was referenced to calculate the ionization degree.A functional relation of breakdown voltage and discharge distance,which is in accord with paschen curve,was obtained.Besides,11 collision reactions,which play a major role in low pressure and weakly ionized hydrogen discharge,are determined.

关 键 词：氢等离子体 极间距 迁移率 碰撞反应 帕邢曲线 

分 类 号：TN132[电子电信—物理电子学]