等离子体交叉场调制开关导通过程的模拟与测试  

Simulation and Characterization of Turn-on Transient of Plasma Discharge CROSSATRON Modular Switch

作　　者：刘竞业[1] 张明[2] 

机构地区：[1]北京化工大学理学院物理学与电子科学系,北京100029 [2]北京真空电子技术研究所第四研究室,北京100015

出　　处：《真空科学与技术学报》2012年第6期499-503,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(项目批准号:50877003)

摘　　要：以冷阴极等离子体交叉场调制开关为研究对象,将系统内放电过程中形成的等离子体视为电子与正离子构成的双流体,引入扩散系数与迁移率来表征电子流与离子流的运动,用离子产率来表征与流体密切相关的离子密度随放电时间的进行而发生的变化,耦合泊松方程来描述等离子体与外电场的相互影响,同时,将气体间隙的脉冲放电合理的与直流放电等效,并确定外电路各量之间的函数关系,利用Comsol软件对调制开关的导通过程进行了数值模拟,所得结果与实测结果吻合,证明了模拟脉冲放电中管内阻抗随时间的变化关系是准确的,从而说明本文所采用的模拟方法对气体放电器件的研制具有积极的指导意义。We addressed the plasma discharge CROSSATRON modular switch. The turn-on transient was modeled, simulated and tested. In the model, the plasma emerged in the discharge was first defined as the two-fluid of electrons and ions;then, motions of electrons and ions were described in terms of diffusion coefficient and mobility, respectively, and the changes in the ion density, closely associated with discharge time, were correlated to the ion yield;and finally, the interaction between the plasma and the external field was evaluated with Poison equation. Moreover, the pulsed discharge at the gap was approximated to a DC discharge, so as to estimate the relationship between various variables of interest in the external circuit. The turn-on process of the switch was simulated with the software package COMSOL. The good agreement of the tested and simulated results confirms that the time-dependence of the impedance in the analog pulsed discharge is valid.

关 键 词：脉冲 直流放电 建模 等离子体 数值模拟 

分 类 号：TN132[电子电信—物理电子学]