Parylene涂覆技术在天馈系统防护上的应用  

Application of Parylene Smear Technology in Protection of Antenna-feeder Devices

作　　者：敖辽辉[1] 

机构地区：[1]中国西南电子技术研究所,成都610036

出　　处：《电讯技术》2012年第6期1035-1037,共3页Telecommunication Engineering

摘　　要：针对部分天馈器件结构复杂和腔体尺寸太小无法进行传统镀覆防护的特点,提出了真空气相沉积派拉纶(Parylene)膜层防护处理方法。采用涂覆硅烷偶联剂、优化涂覆工艺过程解决了Parylene涂覆层与基体的结合力、Parylene膜层质量等关键技术,通过防护试验和电性能测试验证了防护方法的有效性和可行性。Some antenna-feeder devices have too complicated structure or too tiny narrow path to be protected by tra- ditional plating process. According to above characters, vacuum vapor deposition process for Parylene method is pro- posed. Silane process is used to improve the adhesion between Parylene fill and the base. The deposition process is investigated to increase the fill quality. The processed chamber has passed the anti-corrosion and EM test.

关 键 词：直升机载雷达 毫米波平板裂缝阵天线 天馈系统 涂覆技术 防护 派拉纶 真空气相沉积 

分 类 号：TN05[电子电信—物理电子学] TN957