聚3—己基噻吩及其掺杂TiO_2材料对NO_2的气敏特性  

Gas sensitive characteristics of poly-3-hexylthiophene and doped with TiO_2 material to NO_2

作　　者：梁圣法[1] 李冬梅[1] 陈鑫[1] 詹爽[1,2] 刘明[1] 

机构地区：[1]中国科学院微电子研究所,北京100029 [2]青岛科技大学,山东青岛266042

出　　处：《传感器与微系统》2012年第7期55-57,60,共4页Transducer and Microsystem Technologies

基　　金：国家"863"计划资助项目(2009AA03Z444);国家"973"计划资助项目(2009BC939703;2006CB806204)

摘　　要：制作了一种工作于室温下的NO2气体传感器。该传感器以有机聚合物聚3—己基噻吩(P3HT)为敏感材料,以聚对苯二甲酸乙二醇酯(PET)薄膜为柔性衬底。对敏感膜进行了SEM表征。室温下,对不同体积分数的NO2进行了测试,对器件尺寸的影响进行了分析,并对响应规律进行了总结。经实验,对NO2测试下限可达到0.2×10-6。为提高敏感性、减小恢复时间,尝试对敏感膜掺杂TiO2,并同未掺杂的敏感膜进行实验比较,发现对体积分数1.5×10-6的NO2,掺杂TiO2可将敏感性提高8%,恢复性也有明显改善,对周期为1060 s的循环测试表明:掺杂TiO2下阻值基本能完全恢复。A NO2 gas sensor based on polyethylene terephthalate （PET） as substrate with poly-3-hexylthiophene （P3HT） as the sensing film material is fabricated and tested at room temperature. Properties of sensitive membrane are characterized by SEM. Different volume fractions of NO2 are tested, and testing limit reaches to 0.2 ×10^-6, and the response rule is concluded. Sensitivity of devices with different sizes and resistances has been characterized. To improve sensitivity and reduce recovery time, the sensitive film is doped with TiO2. Compared with undoped sensitive membrane, the sensitivity of doped TiO2 can be increased by 8% and a marked improvement of recovery is observed to volume fraction of 1.5 × 10^ -6 of NO2 on a period of 1060 s cycle testing. In the cycle ,the membrane doped with TiO2 can recover fully.

关 键 词：NO2 柔性衬底 聚3-己基噻吩 TIO2 室温 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]