双波长飞秒激光抽运-探测法测量纳米薄膜及界面热物性  

Two-Color Femto-second Laser Pump and Probe Thermoreflectance Method Measuring Nano-Film Thermal Conductivity and Interface Thermal Conductance

作　　者：祝捷[1] 唐大伟[1] 

机构地区：[1]中国科学院工程热物理研究所,北京100190

出　　处：《工程热物理学报》2012年第7期1185-1189,共5页Journal of Engineering Thermophysics

基　　金：国家自然科学基金面上项目(No.50876103)

摘　　要：建立了用来研究时间空间微尺度传热现象的双波长飞秒激光抽运-探测热反射系统,与常规的单波长飞秒激光抽运探测系统相比,双波长的光路设计方案可以大幅提高信噪比,并使共线的聚焦光路更易实现,从而提高测量的准确度。建立了与实验测量过程相应的多层膜热传导模型,并实现了多参数拟合,可用于对体材料或薄膜材料的热导率以及界面热导的准确测量。本文采用这种先进的测量方法测量了SiO_2纳米薄膜的热导率及其与Si之间的界面热导。A two-color femto-second laser pump and probe thermoreflectance system has been established for studying the micro-scale heat transfer.Compared with single-color system,this two-color scheme could highly increase the signal-to-noise ratio,and make it easier to realize the co-line focus design.As a result,the accuracy of the measurement would be increased.A model with regard to the heat transfer process has also been established and used to obtain the thermal conductivity of bulk or film samples,as well as interface thermal conductance.This system has been successfully used to measure the thermal conductivity of SiO_2 nano-film and the interface thermal conductance between SiO_2 and Si substrate.

关 键 词：双波长飞秒激光抽运-探测系统 纳米薄膜 热导率 界面热导 

分 类 号：TK123[动力工程及工程热物理—工程热物理]