15-5PH不锈钢表面多弧离子镀高结合性能TiN膜层研究  

High adhesion TiN film deposition on 15-5PH stainless steel substrate by the multi-arc ion plating technique

作　　者：陈美艳 童洪辉 沈丽如 金凡亚 赵燕 

机构地区：[1]核工业西南物理研究院,四川成都610054

出　　处：《功能材料》2012年第13期1802-1805,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(10775046);中核集团预研基金资助项目(61601090502)

摘　　要：多弧离子镀方法在15-5PH不锈钢材料表面制备结合力、硬度和致密性高的TiN涂层,提高材料表面硬度和抗高温氧化性能。分析结果显示过渡层成分、预热温度、工作气压及负偏压等主要参数对膜层性能影响明显。得到Ti为过渡层时,预热250℃,气压3.0Pa,600V偏压镀膜工艺参数最佳,制备的膜基结合力高于60N,表面硬度>1200HV0.05,膜层表面大液滴密度尺寸最低。膜层表面显微硬度、膜层沉积速率和膜基结合力随工作气压升高不同程度地先升高后降低。The multi-arc ion plating technique was adopted to deposit high quality TiN film on 15-SPH stainless steel substrate in order to improve the performance of suhstrate, such as the surface hardness and the high-temperature oxida- tion resistance. The results showed that the interlayer composition, the preheating temperature, the working pressure and the negative bias all had significant influence on the film properties. The adhesive force between the coating layer and the matrix was about 60N, the surface hardness was more than 1200 HV0.05, and the film had the lowest drop den- sity when using Ti as the interlayer under a preheating temperature of 250℃, a working pressure of 3.0Pa, and a nega- tive bias of 600V. With the increase of the working pressure, the surface hardness, the depositing rate and the adhesive force all increased first and then decreased in different degree.

关 键 词：多弧 TIN 过渡层 结合力 

分 类 号：TQ153.2[化学工程—电化学工业] TG17[金属学及工艺—金属表面处理]