提高轮廓仪对大曲率半径表面形貌测量精度的研究  

Research on Improving Accuracy of Large Radius of Curvature Measurement Using Surface Profiler

作　　者：梁旭[1] 王军华[1] 徐敏[1] 

机构地区：[1]复旦大学光科学与工程系 上海超精密光学制造工程技术研究中心,上海200433

出　　处：《激光与光电子学进展》2012年第7期99-103,共5页Laser & Optoelectronics Progress

基　　金：国家科技重大专项(2011ZX02402);上海市引进技术的吸收与创新计划(2010CH-007)资助课题

摘　　要：结合超精密制造技术,讨论了轮廓仪测量大曲率半径表面形貌存在的精度缺陷。提出了利用NIKONAutocollimator 6D自准直仪辅助Form Talysurf PGI 1250A以提高轮廓仪测量精度的改进方法。当自准直仪的光轴与样品顶点的法线共轴时,旋转样品其顶点的法线方向不变,因此自准直仪的反射像位置也不会变,并且自准直仪有很高的精度,从而可将其用于寻找顶点。基于相关参数对提高轮廓仪测量精度进行了理论计算和Zemax模拟。搭建实验装置对不同曲率半径的样品进行测量,与改进前实验结果进行对比,证明了轮廓仪测量精度提高到原来的2～4倍,适用于测量大曲率半径表面形貌,验证了改进方法的合理性和有效性。The disadvantages of large radius of curvature measurement using surface profiler according to ultra-precision optical manufacturing are discussed.An improved method is proposed to achieve higher accuracy,in which the NIKON Autocollimator 6D is used to assist the measurement of the Form Talysurf PGI 1250 A surface profiler.When the optical axis of autocollimator and the normal direction of vertex of sample are coaxial,rotating the sample,the normal direction of vertex of it will not change,and then the position of reflected image received by autocollimator will not change too.Meanwhile,autocollimator can be used to find the vertex of sample because of its high accuracy.Theoretical calculation and Zemax simulation based on relevant parameters are given.Experimental equipment is set up for measuring samples with different radii of curvature,and comparison with previous experimental results is illustrated.Measurement accuracy of surface profiler is increased to 2～4 times,showing that this method is suitable for large radius of curvature measurement.Rationality and effectiveness of the method are validated.

关 键 词：测量 非球面测量 轮廓仪 大曲率半径 自准直仪 

分 类 号：TG806[金属学及工艺—公差测量技术]