高纯多晶硅在线制备技术及发展趋势  

Industrial Preparation Techniques of High-Purity Polysilicon and Its Development Trends

作　　者：徐远志[1] 

机构地区：[1]昆明冶研新材料股份有限公司,云南昆明650031

出　　处：《云南冶金》2012年第3期75-79,共5页Yunnan Metallurgy

摘　　要：对在线高纯多晶硅生产制备技术——改良西门子法和硅烷法的制备工艺进行了概述,比较了两种在线技术的优缺点,对两种在线技术的发展趋势进行了展望。By summarizing the industrial preparation techniques of high-purity polysilieon including the improved Siemens process and the silane process, the advantages and disadvantages of the two industrial preparation techniques were compared. In addition, the development trends of the above two techniques were expected.

关 键 词：高纯多晶硅 西门子法 硅烷法 

分 类 号：TP311.13[自动化与计算机技术—计算机软件与理论]