半光斑成像式多功能激光瞄准测头的研究  

Study on Multifunctional Laser Aiming Detector Based on Half Facular Point Optical Imagery

作　　者：朱凌建[1,2] 谭宇[1] 邱宗明[1] 刘君华[2] 

机构地区：[1]西安理工大学,陕西西安710048 [2]西安交通大学,陕西西安710049

出　　处：《计量学报》2012年第4期313-316,共4页Acta Metrologica Sinica

基　　金：陕西省教育厅自然科学基金资助项目（09JK684）;陕西省教育厅产业化项目（2010JCl7）

摘　　要：运用半光斑成像原理设计了一种用于三坐标测量机的多功能激光瞄准测头。详细介绍了测头的光学系统工作原理和设计思路，采用自适应控制方法实时调节激光光强使其可以适应不同光学特性表面的瞄准测量，并进行了多功能测头的重复性瞄准测量、灵敏度测量、倾角跟踪实验。实验结果表明，该测头重复性瞄准测量不确定度优于1μm，测量灵敏度可达30mV／μm，激光跟踪瞄准被测曲面倾角可达25°，能满足三坐标测量机的使用要求。该测头具有检测速度快、自动化程度高、瞄准精度高的特点，结合三坐标测量机或者其它测长仪器，能够实现对自由曲面进行快速精确瞄准及轮廓图像瞄准测量，具有广泛的应用前景和实用价值。A multifunctional laser aiming detector applied on coordinate measurement machines was designed based on half facular point optical imagery. The designing thought and operation principle of the multifunctional aiming detector optical system was described in detail. An adaptive intensity control method was used in the circuit to adjust the laser intensity timely so that it can adapt to aiming measurement of different optical properties surface. Repeated aiming measurement experiments, linear sensitivity aiming measurement experiments and inclination tracking measurement experiments of the muhifunctional detector were conducted in practice. The experimental results show that the measurement uncertainty of laser tracking aiming repeatability of the multifunctional detector is less than 1μm with the measurement sensitivity of 30 mV/μm after calibration. The angle measure scale of laser tracking aiming is expected to 25° without any other accessorial equipment, which can be met the requirements of CMMs. This detector with characteristic of high detecting speed, high degree of automation and high aiming accuracy, will be expected to have the ability of free curved surface and imagery tracking aiming measurement of contour with higher speed and accuracy coincided with CMMs or other length measuring instruments and have a wide range of application prospects and a strong practical value for measuring parts profile with a higher precision.

关 键 词：计量学 半光斑成像 激光瞄准 多功能测头 三坐标测量机 

分 类 号：TB92[一般工业技术—计量学]