温室气体六氟化硫的替代技术进展  

Progress in Alternative Technology of Greenhouse Gas Sulfur Hexafluoride

作　　者：于剑昆[1] 

机构地区：[1]黎明化工研究院,河南洛阳471000

出　　处：《化学推进剂与高分子材料》2012年第4期41-48,共8页Chemical Propellants & Polymeric Materials

摘　　要：六氟化硫(SF6)具有优异的化学稳定性和电绝缘性能而使其广泛应用于电器和开关等设备及多种领域;但SF6是一种被列入《京都议定书》的强温室气体,今后将被逐渐禁止使用。当前解决SF6排放问题最有效的方法是用低全球变暖势(GWP)的气体完全代替SF6。详细介绍了在电气绝缘、镁合金冶炼、半导体蚀刻和清洗等领域中SF6的替代技术进展。The sulfur hexafluoride （SF6） is widely used in the electrical apparatus and switch as well as other equipment and many fields due to its excellent chemical stability and electrical insulation performance. However, the SF6 is a strong greenhouse gas listed in the Kyoto Protocol, So it will be stepwise forbidden in the future applications. Currently the most effective method for solving the SF6 emission problem is completely alternating SF6 by using the gases with lower global warming potential （GWP）. The alternative technology progress of SF6 in the electrical insulation, magnesium alloy smelting, semiconductor etching and cleaning, etc. is introduced in detail.

关 键 词：六氟化硫 温室气体 替代品 GWP 技术进展 

分 类 号：TQ124.3[化学工程—无机化工]