Ti-Al-N系功能梯度薄膜结合力的实验研究  

Study of Bonding Strength of Ti-Al-N Functionally Gradient Coatings

作　　者：侯晏红 乔学亮[2] 吴一平[2] 李贺军[1] 

机构地区：[1]西北工业大学材料科学及工程学院,陕西西安710072 [2]华中理工大学材料学院,湖北武汉430074

出　　处：《功能材料》2000年第B05期87-88,共2页Journal of Functional Materials

摘　　要：用划痕法测试了不同成分的Ti -Al-N系功能梯度薄膜及其均质薄膜的膜基结合力。结果表明 ,Ti-Al-N系功能梯度薄膜的膜基结合力高于均质膜 ,且随着氮分压变化间隔的增加 ,结合力逐渐增大。基于膜基匹配及残余应力与结合力的关系 ,合理地解释了成分梯度对Ti -Al-N系功能梯度薄膜结合力的影响。Automatic scratch tester was used to measure the bonding strength between substrate and coatings of Ti-Al-N functionally gradient and uniform coatings.The micrographs of scratches were investigated by OM and SEM.The bonding strength between substrate and coatings of Ti-Al-N FGC is better than that of uniform coatings.The effect of composition gradient on bonding strength was explained by the relation of match between substrate and coatings,residentical stress and bonding strength.

关 键 词：Ti-Al-N 功能梯度薄膜 划痕法 结合力 

分 类 号：TB333[一般工业技术—材料科学与工程]