Synthesis and Characterization of(Na_(0.5)K_(0.5))NbO_3(NKN) Thin Films Formed by a Diol-based Sol-gel Process  

作　　者：Sebastian Wiegand Stefan Flege Olaf Baake Wolfgang Ensinger 

机构地区：[1]Technische Universitt Darmstadt,Department of Materials and Geosciences,Materials Analysis Group,Petersenstrasse 23,64287 Darmstadt,Germany

出　　处：《Journal of Materials Science & Technology》2012年第6期500-505,共6页材料科学技术（英文版）

基　　金：supported by LOEWE-Zentrum AdRIA for financial and Claudia Fasel for the thermal analysis

摘　　要：Lead-free （Na0.sK0.5）Nb03 （NKN） thin films were fabricated by spin coating on Pt/Ti/SiO2/Si substrates by a diol-based sol-gel process. Na-acetate, K-acetate, Nb-pentaethoxide and 1,3 propanediol were used to prepare the NKN precursor solution. Thermal analysis showed two characteristic temperatures of 360 and 600℃. Based on these temperatures, a heat treatment program with pyrolysis at 360℃ and calcination at 600℃ after every layer was used. To avoid inhomogeneities and secondary phases, an excess of sodium and potassium was necessary. To evaluate the proper excess amount of sodium and potassium secondary ion mass spectrometry （SIMS） lateral element maps and X-ray diffraction （XRD） patterns were recorded. An excess amount of 20% led to homogeneous distribution of the elements and to single phase perovskite NKN films with random crystal orientation. Scanning electron microscopy （SEMI images showed a pore free surface with 100 nm grains. The leakage current measurements showed a current of lx10-3 A/cm2 at 150 kV/cm.Lead-free （Na0.sK0.5）Nb03 （NKN） thin films were fabricated by spin coating on Pt/Ti/SiO2/Si substrates by a diol-based sol-gel process. Na-acetate, K-acetate, Nb-pentaethoxide and 1,3 propanediol were used to prepare the NKN precursor solution. Thermal analysis showed two characteristic temperatures of 360 and 600℃. Based on these temperatures, a heat treatment program with pyrolysis at 360℃ and calcination at 600℃ after every layer was used. To avoid inhomogeneities and secondary phases, an excess of sodium and potassium was necessary. To evaluate the proper excess amount of sodium and potassium secondary ion mass spectrometry （SIMS） lateral element maps and X-ray diffraction （XRD） patterns were recorded. An excess amount of 20% led to homogeneous distribution of the elements and to single phase perovskite NKN films with random crystal orientation. Scanning electron microscopy （SEMI images showed a pore free surface with 100 nm grains. The leakage current measurements showed a current of lx10-3 A/cm2 at 150 kV/cm.

关 键 词：Sol-gel process （Nao.sK0.5）NbO3 Thin film Perovskite LEAD-FREE Piezo material 

分 类 号：TB383.2[一般工业技术—材料科学与工程]