Preparation and characterization of barium strontium titanate/silicon nanoporous pillar array composite thin films by a sol-gel method  

作　　者：Shun-hua Xiao Wei-fen Jiang 

机构地区：[1]Co11ege of Chemistry and Bioengineering, Key Laboratory of New Processing Technology for Nonferrous Metals and Materials (Ministry of Education), Guilin University of Technology, Guilin 541004, China [2]Department of Mathematics and Information Science, North China Institute of Water Conservancy and Hydroelectric Power, Zhengzhou 450011, China

出　　处：《International Journal of Minerals,Metallurgy and Materials》2012年第8期762-767,共6页矿物冶金与材料学报（英文版）

基　　金：supported by the Research Funds of Guangxi Key Laboratory of Information Materials, China (No.0710908-04-K);Guangxi Natural Science Fund, China (No.0832257);the Research Funds of Education Bureau of Guangxi Province, China (No.200708LX333)

摘　　要：Barium strontium titanate （Ba0.5Sr0.5TiO3, BST）/silicon nanoporous pillar array （Si-NPA） thin films were prepared by a spin-coating/annealing technique based on Si-NPA with micro/nano-structure. Both the isomer conversion of acetylacetone and the network structure combined by enol and Ti-alkoxide facilitate the formation of the BST sol and the subsequent crystallization. Before the perovskite BST begins to form, the intermediate phase （Ba, Sr）Ti2OsCO3 is found. The boundary between BST and Si-NPA is of clarity and little interface diffusion, disclosing that Si-NPA is an ideal template substrate in the preparation of multifunctional composite films.Barium strontium titanate （Ba0.5Sr0.5TiO3, BST）/silicon nanoporous pillar array （Si-NPA） thin films were prepared by a spin-coating/annealing technique based on Si-NPA with micro/nano-structure. Both the isomer conversion of acetylacetone and the network structure combined by enol and Ti-alkoxide facilitate the formation of the BST sol and the subsequent crystallization. Before the perovskite BST begins to form, the intermediate phase （Ba, Sr）Ti2OsCO3 is found. The boundary between BST and Si-NPA is of clarity and little interface diffusion, disclosing that Si-NPA is an ideal template substrate in the preparation of multifunctional composite films.

关 键 词：barium strontium titanate SILICON nanoporous materials composite films sol-gel process 

分 类 号：TN304[电子电信—物理电子学] O484.1[理学—固体物理]