红外跟踪系统中非球面硅透镜加工技术研究  

Processing technology of aspheric silicon lens in IR tracking system

作　　者：马放[1] 付秀华[1] 贾宗合[1] 谢影[1] 唐昊龙[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《应用光学》2012年第4期784-787,共4页Journal of Applied Optics

基　　金：广东省教育部产学研结合项目(2010B090400048)

摘　　要：随着军用光学仪器的飞速发展,红外光学材料单晶硅广泛应用于红外光学元件和半导体行业,为了满足精密仪器对光学系统的要求,对光学元件的面型精度要求越来越高。针对红外跟踪系统中对高精度单晶硅透镜的加工技术要求,以Ф26mm的单晶硅透镜为例,通过多次反复研磨修抛和检测分析,并不断优化工艺参数,设计了特殊的夹具,解决了单晶硅表面光洁度问题以及中心偏差难以控制的加工技术难题,并实现了批量生产。经检测,单晶硅非球面面形精度达到0.2μm,表面光洁度达到Ⅲ级以上,中心偏差在1μm以内,各项参数均满足了红外跟踪系统的要求。With the rapid development of military optical instruments, IR optical materials have been widely used in IR optical elements and semiconductor industry, especially single-crystal silicon. To meet the precision instruments requirement for the optical system, the surface figure of the optical components has been increasingly demanded. Aiming at the processing technology requirement of high-precision silicon lens in the IR tracking system, taking a Ф26mm silicon lens as an example, by repeatedly grinding, repair/polishing, testing analysis, continuous optimization of the process parame- ters and designing a special fixture, this paper solved the problem of the silicon surface smoothness and the difficult control of the center deviation, and achieved mass production. After testing, the pre- cision of the single-crystal silicon aspheric surface figure got 0.2μm, the surface smoothness achieved above the grade Ⅲ and the center deviation was less than 1μm. All the parameters met the require- ments of the infrared tracking system.

关 键 词：非球面 单晶硅 修正抛光 面形精度 表面光洁度 

分 类 号：TN213[电子电信—物理电子学] TG580.6[金属学及工艺—金属切削加工及机床]