双层红外微测辐射热计的微桥结构仿真  

Simulation of structures for two-layer infrared microbolometers

作　　者：杨卓[1] 许向东[1] 敖天宏[1] 王志[1] 樊泰君[1] 黄龙[1] 蒋亚东[1] 陈超[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《红外与激光工程》2012年第7期1677-1683,共7页Infrared and Laser Engineering

基　　金：国家自然科学基金(61071032);国家重点实验室开放基金(KFJJ200917)

摘　　要：非制冷红外探测器具有广阔的军事和民用前景。近年来,出现了一类性能优越的新型双层微测辐射热计型红外探测器。利用有限元分析方法和光学导纳矩阵法详细研究了两种类型的双层微测辐射热计的主要性能。结果表明,双层微测辐射热计的综合性能优于单层微测辐射热计。其中,双层S型结构的温升最优,但其力学稳定性较差,难以满足实践需要;双层U型结构的温升虽低于双层S型结构的温升,但明显优于单层微桥;重要的是,双层U型结构在光吸收性能、力学稳定性、器件制造等方面均优于双层S型结构。所以,双层U型结构的综合性能更优。还设计了一种综合性能更优的改进型双层U型结构。Uncooled infrared detectors are widely used in both civilian and military applications. Recently, new two-layer microbolometers with improved performance were developed. Finite element analysis and optical admittance matrix calculation were used to study the main properties of such two-layer microbolometers. The simulation results revealed that compared with the conventional one-layer microbolometers, the new two-layers microbolometers exhibit improved performance under the same conditions. In addition, the thermal property of S-type two-layer bolometer is excellent. However, the stability of S-type two-layer bolometer is poor whose structure is very difficult to be fabricated practically. Although the temperature rise for U-type two-layer bolometer is not so good as that for S-type bolometer, the thermal property of U-type two-layer bolometer is significantly better than those for the traditional one-layer bolometers. Particularly, U-type two-layer bolometer exhibits better light absorption, mechanical stability and device manufacturing, compared with those of S-type two-layer microbolometers. Therefore, the optimal integrated properties U-type two-layer bolometer shows is much better. In addition, a new U-type two-layer bolometer with better comprehensive properties was designed.

关 键 词：非制冷红外探测器 有限元分析 光学导纳矩阵法 

分 类 号：TN215[电子电信—物理电子学]