高温环境下压力传感器的温度补偿方法研究  

Compensation Method of Pressure Sensor in High Temperature Environment

作　　者：赵航[1] 张大力[1] 

机构地区：[1]清华大学自动化系,北京100084

出　　处：《自动化与仪表》2012年第8期18-21,共4页Automation & Instrumentation

摘　　要：在高温环境下,压力传感器及其周边电路的特性会发生变化,导致压力测量的结果误差较大。一套实际工程系统中的压力测量模块在150℃时的测量误差达到3%以上,不能满足工程需求。该文分析了压力传感器的温度补偿原理,提出了三种补偿算法,并一一进行了实验验证。其中二阶抛物线插值法可将测量精度提高到0.02%,很好地满足了实际工程的需求。The characteristics of a pressure sensor and its peripheral circuit change in the environment of high tem- perature,leading to the results of inaccurate pressure measurement. The errors of a pressure measurement module in a real system reaches 3% in the temperature of 150℃,which can＇t meet the requirements of engineering. The author analyzes the principle of temperature compensation in pressure sensor in this paper,puts forward three algorithms of compensation,and tests their effects through experiments. The method of parabolic interpolation can improve the mea- surement accuracy to 0.02%,which is good enough to meet the practical needs.

关 键 词：压力传感器 温度补偿 曲线拟合 线性插值 抛物线插值 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]