低温热处理对Graphit-iC类石墨碳膜组织结构及耐磨性的影响  

EFFECT OF LOW TEMPERATURE HEAT TREATMENT ON STRUCTURE AND WEAR BEHAVIOR OF GRAPHIT-iC GRAPHITE-LIKE CARBON COATINGS

作　　者：李潇[1] 施雯[1] 苑俊峰[1] 张健[1] 陈智勇[1] 

机构地区：[1]上海大学材料科学与工程学院,上海200072

出　　处：《上海金属》2012年第4期29-32,共4页Shanghai Metals

摘　　要：应用拉曼光谱(Raman)等测试方法分析了不同热处理温度对PVD技术制备的Graphit-iC类石墨碳膜涂层的组织结构、显微硬度、结合强度和磨损率的影响规律。结果表明:随温度升高,涂层发生sp3→sp2结构转变,相对强度比I_D/I_G增加,石墨化倾向增大;涂层磨损率在25～250℃温度区间内保持较低的水平,当温度继续上升后表面显微硬度及结合力降低,磨损率显著增大,耐磨性降低。The effects of heat treatment temperature on microstructure, micro-hardness, wear and adhesion strength of Graphit-iC graphite-like carbon coatings prepared by PVD technique were analyzed by Raman spectroscopy and other test. The results indicated that as temperature increasing, sp3→sp2 phase transition was observed in the coatings and the intensity ratio ID/IG increased, and the tendency of graphitization was obvious. The wear rate maintained at low level between the temperature of 25 - 250 ℃, although the wear rates of the coatings increased obviously as the temperature increased, the micro-hardness and coating-substrate adhesion strength decreased.

关 键 词：Graphit-iC 类石墨碳膜 低温热处理 微观结构 耐磨性 

分 类 号：TG174.44[金属学及工艺—金属表面处理]