一种温度补偿式光纤氢气检测技术  

Temperature compensation type optical fiber hydrogen concentration measurement technique

作　　者：张毅[1] 庄志[1] 黎启胜[1] 张敏[2] 杨振[2] 

机构地区：[1]中国工程物理研究院总体工程研究所,绵阳621900 [2]清华大学电子工程系光纤传感研究室,北京100084

出　　处：《仪器仪表学报》2012年第7期1573-1578,共6页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金委员会-中国工程物理研究院联合基金(10776016);中国工程物理研究院武器装备预先研究基金(426020402)资助项目

摘　　要：基于非本征法布里-珀罗光纤传感检测技术,分析研究了氢敏薄膜特性,实现了氢气传感单元设计及制作,简要介绍了传感器结构、制作方法、镀膜工艺及设备。通过分析氢气浓度与法布里-珀罗腔长变化间的关系,建立了光纤法布里-珀罗氢气传感理论模型。为增强系统工程实用性,着重研究了传感器温度与氢气浓度交叉敏感问题,并利用温度补偿技术消除环境温度干扰。介绍了温度补偿原理并构建实验设备,最后通过氢气浓度响应实验及温度特性实验,证明理论公式推导结果与实验数据吻合较好,且氢气传感器温度敏感性降低。此设计具有一定工程实用价值。Based on extrinsic Fabry-Perot interferometric （EFPI） optical fiber measurement technique, the performance of the hydrogen-sensing thin film is researched; the design and fabrication of hydrogen sensor are accomplished. The sensor structure, fabrication method, film deposit technique and related set-ups are simply introduced in this paper. A sensing theoretical model is established through analyzing the relationship between the change of Fabry-Perot gap length and hydrogen concentration. To enhance the stability of the system for practical application, the cross-sensitivity of hydrogen concentration to EFPI sensor temperature is emphatically researched, and the interference caused by the variation of the environmental temperature is decreased using a temperature compensating technique. The temperature compensation principle is discussed and the experiment set-ups are built. Lastly, hydrogen concentration response experiment and temperature characteristic experiment prove that the analytic data are coinci- dent with the experiment results and the temperature sensitivity of the hydrogen sensor is reduced. This design has practical engineering application value.

关 键 词：光纤传感器 氢气检测技术 温度补偿 非本征法布里珀罗干涉仪 

分 类 号：TN247[电子电信—物理电子学]