碳纳米薄膜材料的研究进展  

Research Progress in Nanomaterials of Carbon Thin Films

作　　者：关磊[1] 

机构地区：[1]辽宁石油化工大学化学与材料科学学院,辽宁抚顺113001

出　　处：《微纳电子技术》2012年第8期522-525,552,共5页Micronanoelectronic Technology

摘　　要：碳纳米薄膜是一种新型碳纳米材料,因其具有优良的物理和化学性能、很好地应用前景而受到了广泛关注。综述了无定形碳膜、石墨烯膜、类金刚石碳(DLC)膜、金刚石膜、CNx膜和碳纳米管(CNT)膜的制备方法和结构的研究进展,总结了其在不同领域的潜在应用价值。探讨了该研究领域亟待解决的问题以及今后的发展前景。今后一段时间内对碳纳米薄膜材料的制备和应用研究将会更加深入,研究应致力于碳纳米薄膜制备方法的简单化,寻求价格低廉的碳源,同时对应用开发还要有所拓展。The carbon nano thin film is a novel carbon nanomaterial, which has excellent physical and chemical properties, shows a good prospect of applications, and attracts extensive attentions. The study progress in the preparation and structures of the carbon thin film, including the amorphous carbon film, grapheme film, diamond-like carbon （DLC） film, diamond film, CNx film, carbon nanotubes （CNTs） film are summarized. Besides that, the value in the potential applica- tion fields is also summarized. The problems to be solved and possible prospect of the develop- ment for the research fields are discussed. In the coming period, the study of the preparation and applications of the carbon nano thin film will be more in-depth. The research should be committed to simplify preparation methods, search for low-cost carbon sources, and expand the application fields of the carbon nano thin film.

关 键 词：碳纳米材料 薄膜 二维 石墨烯膜 场发射 

分 类 号：TB383[一般工业技术—材料科学与工程]