微纳加工中探针与工件碳元素作用机理  

Interaction Mechanism Between the Probe and Carbon of Workpiece in the Process of Micro-and Nano-Machining

作　　者：陈志舜[1] 何道伟[1] 李勇[2] 王利光[1] 

机构地区：[1]江南大学理学院,江苏无锡214122 [2]清华大学摩擦学国家重点实验室微纳制造分室,北京100084

出　　处：《微纳电子技术》2012年第8期548-552,共5页Micronanoelectronic Technology

基　　金：国家高技术研究发展计划(863计划)资助项目(2007AA04Z346);江苏省自然科学基金资助项目(BK2008097);中央高校基础科研专项资金资助项目(JUSRP31005)

摘　　要：以加工件中碳原子为基本模型,构成与电极间相互作用系统。通过理论计算和模拟研究了碳元素在外加电极情况下,整个系统的电子传输过程与电子态密度的分布,结果显示费密能级附近态密度不为零,有能带存在,且能带较宽,离域性较强。同时对电极和工件间距不断变化时系统的电子传输和态密度的变化进行了研究,结果表明,随着距离的增加,本征能量不断减少,电子态密度降低,电子隧穿减弱,从而导致传输概率也逐渐降低。当距离大于0.4 nm时,电子不能完全通过,电火花加工处于截止状态。An interaction system between the basic model based on carbon atoms in the workpiece and the work electrode was composed. The electronic transmission and the distribution of the density of state （DOS） for the system with applied electrodes for the carbon were researched using the theoretical calculation and simulation technology. The result shows that the DOS near Fermi level is not zero, the energy with the wide band is existed and has a strong polarizability. The change of the electronic transmission and DOS with different distances between the electrode and workpiece was also researched. The results show that the intrinsic energy, DOS of the elec- tron and electronic tunneling decrease with the increase of the distance, thus the electronic trans- mission probability is reduced. The process of the electro discharge machining stops since the electrons can not transport when the distance between the electrode and workpiece is larger than 0. 4 nm.

关 键 词：微纳电火花加工 传输谱 态密度(DOS) 格林函数 电子传输 

分 类 号：TN305[电子电信—物理电子学]