基于全介质薄膜法布里一珀罗滤光片的1550nm可调谐外腔半导体激光器  

1550 nm Tunable External Cavity Semiconductor Laser Based on Single Cavity All-Dielectric Thin-Film Fabry-Perot Filter

作　　者：鲁远甫[1] 肖啸[3] 刘文权[2] 冯广智[2] 龚小竞[2] 于文龙[2] 时华锋[2] 李娇[2] 金雷[2] 焦国华[1] 吕建成[1] 于峰崎[3] 

机构地区：[1]中国科学院深圳先进技术研究院光电工程技术中心,广东深圳518055 [2]中国科学院深圳先进技术研究院生物光子学研究中心,广东深圳518055 [3]中国科学院深圳先进技术研究院集成电子技术研究中心,广东深圳518055

出　　处：《中国激光》2012年第B06期14-19,共6页Chinese Journal of Lasers

基　　金：基金项目：中国科学院功能晶体与激光技术重点实验室开放课题资助课题.

摘　　要：提出并实现了一台基于单腔全介质薄膜法布里一珀罗滤光片的1550nm可调谐外腔半导体激光器。介绍了其内部的光学元件及其工作原理，随后对该半导体激光器的纵模输出特性进行了理论分析，搭建了该可调谐外腔半导体激光器。在不同的实验条件下，对该可调谐外腔半导体激光器在调谐过程中的输出波长、线宽及功率进行了实时同步测量。由所测数据总结出最佳实验条件，并得到了此条件下可调谐外腔半导体激光器的各相关参数。该可调谐外腔半导体激光器有一个线性的无跳模波长调谐区域（1547．203～1552．426）nm，一个稳定的输出光功率范围（40～50）μw，以及一个稳定的输出单纵模分布、线宽范围（100t150）MHz。该可调谐外腔半导体激光器可用于环境监测、原子与分子激光频谱研究、精确测量等领域。A 1550 nm linearly tunable external cavity semiconductor laser （ECSL） based on single cavity all- dielectric thin-film Fabry-Perot filter is proposed and realized here. Its internal optical components as well as their operation mechanisms are introduced one by one first, and then its longitudinal mode output characteristic is analyzed theoretically. At last, the experiment platform for the output characteristics measurement of the tunable ECSL is set up~ under different experimental conditions and with optical spectrum analyzer, scanning Fabry-Perot interferometer versus laser power meter, accurate and real-time measurements for the output wavelength, output line-width and output power of the tunable ECSL during its tuning process are executed. The optimal experimental condition from the measured datum is summed up, and the tunable ECSL relevant parameters under this condition is obtained. The tunable ECSL will have a linear mode-hop-free wavelength tuning region of 1547. 203- 1552. 426 nm, a stable outputoptical power in the range of 40~ 50 ~W, and a stable output longitudinal mode distribution of a single longitudinal mode with a line-width in the range of 100 ~ 150 MHz. This tunable ECDL could be used in the application of environmental monitoring, atomic and molecular laser spectroscopy research, precise measurements, and so on.

关 键 词：激光器 法布里一珀罗滤光片 外腔半导体激光器 1550 nm激光 可调谐 

分 类 号：TN248.1[电子电信—物理电子学]