Structure and magneto-electrical properties of Fe-C films prepared by magnetron sputtering  

作　　者：MA Lei LIU ZhongWu ZENG DeChang YU HongYa ZHONG XiaPing ZHANG XiaoZhong 

机构地区：[1]School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China [2]School of Materials Science and Engineering, Guilin University of Electronic Technology, Guilin 541004, China [3]Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China

出　　处：《Science China(Physics,Mechanics & Astronomy)》2012年第9期1594-1598,共5页中国科学：物理学、力学、天文学（英文版）

基　　金：supported by the National Natural Science Foundation of China (Grant No. U0734001);the Fundamental Research Funds for the Central Universities,SCUT (Grant Nos. 2009ZM0247 and 2012ZZ0015)

摘　　要：Fe-doped amorphous FexCl~ granular films were prepared on n-Si （100） substrates by d.c. magnetron sputtering. The structur- al properties of FexC1-x films were investigated by X-ray diffraction （XRD）, atomic force microscope （AFM） and Raman spec- troscopy. The results show that the iron and carbon of as-deposited films are in amorphous state, and the FexC1-x films are di- amond-like carbon （DLC） films. After doping iron into the DLC films, a smooth surface morphology of the FexC1-x films has been obtained with the surface roughness Ra of about 0.231 nm for x=18at%. The FexC1-x films have good soft magnetic prop- erties with the coercivity of approximately 20 Oe. A high positive magnetoresistance （MR） up to 93% with x=lat% was ob- served in a FexCl-x granular film at 300 K. The resistance characteristic of Fe-C films is changed at about 230 K and the positive MR effect can be understood by the p-n heterojunction theory.Fe-doped amorphous Fe x C 1 x granular films were prepared on n-Si(100) substrates by d.c.magnetron sputtering.The structural properties of Fe x C 1 x films were investigated by X-ray diffraction(XRD),atomic force microscope(AFM) and Raman spectroscopy.The results show that the iron and carbon of as-deposited films are in amorphous state,and the Fe x C 1 x films are diamond-like carbon(DLC) films.After doping iron into the DLC films,a smooth surface morphology of the Fe x C 1 x films has been obtained with the surface roughness Ra of about 0.231 nm for x=18at%.The Fe x C 1 x films have good soft magnetic properties with the coercivity of approximately 20 Oe.A high positive magnetoresistance(MR) up to 93% with x=1at% was observed in a Fe x C 1 x granular film at 300 K.The resistance characteristic of Fe-C films is changed at about 230 K and the positive MR effect can be understood by the p-n heterojunction theory.

关 键 词：carbon films Fe-doped DLC films MAGNETORESISTANCE magnetron sputtering 

分 类 号：O484.1[理学—固体物理] F121.2[理学—物理]