碳纤维表面沉积碳化钨膜研究  

Study of deposition of tungsten carbide film onto carbon fiber

作　　者：李一[1,2] 李金普[1] 李发长[1] 柳学全 李楠 周武平 贾成厂[1] 

机构地区：[1]北京科技大学材料科学与工程学院,北京100083 [2]中国钢研科技集团有限公司,北京100081

出　　处：《粉末冶金技术》2012年第3期214-218,共5页Powder Metallurgy Technology

基　　金：国家高技术研究发展计划资助项目(2009AA03Z116)

摘　　要：通过W(CO)6化学气相沉积(MOCVD)工艺,在碳纤维表面沉积得到了碳化钨膜材料,研究了碳纤维表面沉积碳化钨膜的工艺条件。结果表明:在400℃沉积温度下沉积时间15min,一定浓度的W(CO)6可解离沉积在碳纤维表面形成致密碳化钨膜;膜层厚度0.4μm,物相为WC1-x相,与碳纤维基体结合强度高。DTA分析表明,复合碳纤维的抗热氧化性能得到了明显提高。Carbon fibers were coated with tungsten carbide film by metal organic chemical vapor deposition method with a precursor of hexacarbonyl tungsten,and the processing parameters of depositing tungsten carbide onto carbon fiber were studied.The results show that the surface of carbon fibers is covered with a dense and regular tungsten carbide film which is deposited at temperature of 400℃with holding time of 15min.The thickness of as-deposited film is about 0.4μm,and the phase of film is WC1-x.There is good adhesion between the coated film and carbon fiber.The DTA analysis results indicate that the thermal anti-oxidization properties of carbon fiber composites are improved significantly.

关 键 词：碳纤维 金属有机化学气相沉积(MOCVD) 碳化钨 六羰基钨 

分 类 号：TG174.44[金属学及工艺—金属表面处理]