不同脉宽皮秒激光对介质膜损伤修复的热影响  

Heat Affection of Pico second Laser Irradiation with Different Widths on the Dielectric Film Damage Ablation

作　　者：熊智敏[1] 张攀政[1] 范薇[1] 汪小超[1] 黄大杰[1] 李学春[1] 

机构地区：[1]中国科学院上海光学精密机械研究所高功率激光与物理联合实验室,上海201800

出　　处：《中国激光》2012年第8期69-76,共8页Chinese Journal of Lasers

摘　　要：为了更深层次探究超短脉冲激光对惯性约束聚变(ICF)光学系统中常见的多膜层元件损伤修复性能以及特点,分别采用了240、35、6ps的1053nm激光脉冲在1053nm 0°高反膜上进行了损伤修复以及损伤增长测试实验,并在1053nm 45°高反膜上进行了大损伤区域的扫描修复实验。通过比较不同脉宽的修复点形貌以及损伤增长阈值,说明了超短脉冲用于修复多膜层光学元件损伤的优越性,并且脉宽越短修复效果越好。多点脉冲扫描修复结果表明,可以通过三维控制系统来任意控制扫描修复点形貌以达到最佳修复状态。In order to deeply explore the damage characteristic and damage morphology of multi-layer optical components in inertial confinement fusion （ICF） optical system, 1053 nm laser pulses with different widths of 240, 35, 6 ps have been used to research damage ablation and damage resistant experiments at large area damage pits at 45° high reflection film. By comparing the morphology and damage resistant threshold of the ablation pits at different pulse widths, the results show that it is superior to use ultra-short pulse to repair multi-layers optical components, and the shorter pulse width is used, the better results can be got. The results of scanning ablation indicate that with the help of three-dimensional control system, the better repairing status can be got by changing the shape of the ablation pits.

关 键 词：薄膜 超快光学 多膜层光学元件损伤 扫描修复 

分 类 号：TN249[电子电信—物理电子学]