膜厚对导电氧化锌宽带抗反射涂层的太赫兹传输影响  

Influence of Thickness of Al-Doped ZnO Films as Broadband Antireflection Coating on Teraherz Transmission

作　　者：罗胜耘[1,2] 沈杰[1] 马国宏[3] 李栋[3] 

机构地区：[1]复旦大学材料科学系,上海200433 [2]贵州民族学院理学院,贵阳550025 [3]上海大学物理系,上海200444

出　　处：《真空科学与技术学报》2012年第8期717-721,共5页Chinese Journal of Vacuum Science and Technology

基　　金：贵州民族学院科研项目(201014)

摘　　要：利用直流磁控溅射方法,在石英基底上制备了可用于太赫兹电磁波频率范围内的宽带抗反射涂层的掺铝氧化锌导电薄膜。在太赫兹时域光谱频率0.1~1.0THz范围内研究不同厚度的氧化锌薄膜的介电响应,得到了与频率相关的电导率、吸收和薄膜折射率,着重研究了膜厚对太赫兹波传输特性的调制作用。实验结果很好地符合了经典的Drude模型,表明可以通过控制氧化锌薄膜的厚度来改变太赫兹波的传输特性,并且导电氧化锌薄膜能够作为太赫兹频段范围的宽带抗反射涂层应用于衬底和光学器件上。The transparent,conducting Al-doped ZnO（AZO） films,to be used as the antireflection coating in terahertz transmitter films,were deposited by DC magnetron sputtering on quartz substrates.The impacts of the growth conditions,including the sputtering power,deposition rate and film thickness,on its transmission characteristics,such as the dielectric response,frequency dependent conductivity,power absorption and reflection index,were evaluated in the frequency range of 0.1～1.0 THz.The results show that the film thickness strongly modulates the teraherz transmission characteristics,and that the AZO film works fairly well as the broadband antireflection coating.The experimental data agree with the calculated results based on classic Drude model.

关 键 词：太赫兹时域光谱 导电氧化锌膜 宽带抗反射 薄膜厚度 

分 类 号：O43[机械工程—光学工程]