光子晶体垂直腔面发射激光器的研究进展  

Research Progress of Photonic Crystal Vertical Cavity Surface Emitting Laser

作　　者：王华勇[1] 许兴胜[1] 

机构地区：[1]中国科学院半导体研究所集成光电子国家重点实验室,北京100083

出　　处：《激光与光电子学进展》2012年第9期18-22,I0002-I0004,共8页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(60877030;91121019);国家863计划(2009AA03Z406)资助课题

摘　　要：单模垂直腔面发射激光器(VCSEL)具有低功耗、小发散角、高调制带宽和易于二维集成等优点,在光互连、光存储、高速激光打印和长波通讯等方向有着很好的应用前景。调节VCSEL顶部和底部反射层的结构可以很容易地实现单纵模条件,然而要实现横向单模输出,就要同时对出射光加以横向限制。在VCSEL的顶部反射层刻蚀出二维光子晶体结构构成的光子晶体VCSEL实现了稳定的单横模激光输出。介绍了光子晶体VCSEL的基本结构、工作原理、研究进展和应用领域,并探讨了如何使光子晶体VCSEL获得更高的出光功率、控制激光偏振特性和减小发散角等问题。最后评述了光子晶体VCSEL的国内研究现状,并对未来的研究做了展望。Single-mode vertical cavity surface emitting laser（VCSEL） has shown great potential ability in optoelectronic applications such as optical interconnection,optical storage,high-speed laser printing and long-wave communication as a result of its advantages in low-power consumption,small divergence angle,high modulation bandwidth and easy two-dimensional（2D） integration.The top and bottom reflective layers can control its vertical mode excellently,but if we want to obtain a single fundamental transverse mode,we must limit the emergent light in the transverse direction.Recently,with the technique of etching 2D photonic crystal holes into the top distributed Bragg reflector,single fundamental mode photonic crystal VCSEL is made successfully.In this review,we focus on the structure,operating principle,researching progress and application fields,and discuss how to improve the output energy,control the polarization and reduce divergence angle.At last,we present the domestic research situation and prospect of future research.

关 键 词：激光器 光子晶体 垂直腔面发射激光器 单模 光子集成电路 

分 类 号：TN248.4[电子电信—物理电子学]