三氯氢硅气相色谱分析条件研究  

Study on quantitative GC analysis conditions for trichlorosilane

作　　者：杨裴[1] 范国强[1] 白莹[1] 郭永欣[1] 胡家啟 叶世胜 

机构地区：[1]中海油天津化工研究设计院,天津300131 [2]浙江新安化工有限公司

出　　处：《无机盐工业》2012年第9期51-53,共3页Inorganic Chemicals Industry

摘　　要：对三氯氢硅气相色谱分析条件进行了研究,确定了三氯氢硅毛细管柱的色谱分析条件。采用确定的色谱分析条件进行了方法的线性范围测定,得到线性相关系数R=0.999 93。进行了方法的平行性和重复性试验,结果表明:方法的平行性好,重复性好,三氯氢硅质量分数的相对标准偏差(RSD)小于0.02%,结果令人满意。Analysis conditions of trichlorosilane by gas chromatography were studied, and the optimum analysis conditions of gas chromatography with capillary column for trichlorosilane were comfirmed.The liner range of this analysis method was determined with the defined analysis conditions, and linear correlation was obtained,i.e.R =0.999 93.Parallel and repeated tests were also carried out and results showed the method had good parallelity and repeatability.The relative standard deviation （RSD） of the mass fraction of trichlorosilane was less than 0.02% and the result was satisfied.

关 键 词：三氯氢硅 气相色谱法 毛细管柱 

分 类 号：TQ127.2[化学工程—无机化工]