氘化及氦离子注入对钪膜的表面形貌和相结构的影响  

The influence of deuteration and helium-implantation on the surface morphology and phase structure of scandium thick film

作　　者：彭述明[1] 申华海[2] 龙兴贵[1] 周晓松[1] 杨莉[2] 祖小涛[2] 

机构地区：[1]中国工程物理研究院核物理与化学研究所,绵阳621900 [2]电子科技大学物理电子学院,成都610054

出　　处：《物理学报》2012年第17期396-402,共7页Acta Physica Sinica

基　　金：国家自然科学基金委员会-中国工程物理研究院联合基金(批准号:10976007);国家自然科学基金(批准号:50871106);中国工程物理研究院科学技术发展基金(批准号:2009A0301015)资助的课题~~

摘　　要：采用XRD,SEM,AFM等详细研究了氘化及氦离子注入对钪膜的表面形貌和相结构的影响.结果表明,在单晶硅及抛光Mo基片上制备的钪膜均具有(002)晶面择优取向;钪膜氘化后表面会出现大量孔洞,氘化后氘化钪(ScD2)晶粒长大,但内部会残留少量未完全氘化反应的晶粒尺寸较小的ScD_(0.33)/Sc晶粒;氦离子注入对钪及氘化钪的表面形貌没有明显影响,离子注入的氦将在钪及氘化钪晶格中聚集成泡,导致氦离子注入层中的钪及氘化钪衍射峰向低角度偏移,并且氦泡的聚集具有择优取向性.The effects of deuteration and helium-implantation on the surface morphology and phase structure of scandium （Sc） thick film are investigated by X-ray diffraction （XRD）, Scanning Electron Microscopy （SEM） and Atomic Force Microscopy （AFM） methods. The preferred orientation of （002） crystal plane is observed for both films deposited on substrates of monocrystalline-silicon and polished- molybdenum. A great number of holes appear on surface after deuteration and the grain size of ScD2 is bigger than that of Sc, whereas a few ScDo.33/Sc grains with relatively small grain size retain inside crystal. The surface morphologies of scandium and scandium deuteride films are slightly affected by helium-implantation. The formation of helium bubbles with a preferred orientation in the crystal lattice of scandium and scandium deuteride, generated by the aggregation of ion-implanted helium, causes the corresponding diffraction peaks of scandium and scandium deuteride phase to shift towards smaller angles.

关 键 词：钪膜 氘化 氦离子注入 表面形貌 

分 类 号：O484.1[理学—固体物理]