可调整光程的激光测长机  

Laser measuring machine of adjustable optical path

作　　者：黄雷[1] 马宏[1] 窦艳红[2] 马钟焕[2] 杨璐 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]吉林省计量科学研究院几何量室,吉林长春130022 [3]吉林东光精密机械厂,吉林长春130000

出　　处：《红外与激光工程》2012年第8期2192-2196,共5页Infrared and Laser Engineering

基　　金：国家863计划(2007AA701203)

摘　　要：为进一步提高激光测长机的测量精度及可靠性,满足高精度长度尺寸的计量检定要求,研制了一种可调整光程的激光测长机。采用激光干涉仪作为测量基准,结构设计符合阿贝原则,同时,可根据被测长度的大小调整激光干涉仪和测量组件的安装位置,提高了测量准确度。并对影响激光测长机测量准确度的误差进行了不确定度分析。实验结果表明,该激光测长机的测量准确度达到了±(0.5μm+1.5×10-6L),测量重复性为0.2μm。满足高测量精度及高可靠性等技术指标要求。To improve the accuracy and reliability of laser measuring machine, a laser measuring machine of adjustable optical path, which adopted laser interferometer as measuring datum was developed. The system accorded to Abbe principle in structure. The size of the measuring length could be altered by adjusting the laser interferometer and its accessory. Thus, the measuring accuracy was improved. The uncertainty of error which affected laser measuring machine＇s accuracy was analyzed. The .results show that, the accuracy of laser measuring machine gets to ±40.5μm＋1.5×10^-6L）, the measurement reproductivity is 0.2 μm. The system meets the technical requirements with high accuracy and high reliability.

关 键 词：计量学 可调整光程 激光测长机 阿贝原则 直接测量 

分 类 号：TN249[电子电信—物理电子学]