微流控芯片微沟道的超声压印制作  

Fabrication of Micro-Channels of Microfluidic Chips Based on Ultrasonic Imprinting

作　　者：罗怡[1] 王良江[1] 祁娜[1] 王晓东[1] 

机构地区：[1]大连理工大学辽宁省微纳米技术及系统重点实验室,大连116023

出　　处：《纳米技术与精密工程》2012年第5期458-463,共6页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(50975037);留学回国人员科研启动基金资助项目

摘　　要：作为一种新型聚合物微结构成形方法,超声波压印具有成形速度快和基片整体变形小的特点,但是微结构在较大面积成形时存在均匀性较差的问题.本文面向微流控芯片中微沟道的超声波压印成形,通过设计正交实验和有限元仿真研究的方法,分析了超声压印工艺参数对微流控芯片成形质量和均匀性的影响原因及规律.结果表明,可以通过优化超声波压印压力、振幅和超声波作用时间提高压印均匀性,其中超声波压印压力对成形精度和均匀性的影响最大.采用优化后的工艺参数进行实验,在48 mm×32 mm面积的PMMA微流控芯片基片上成形了微沟道,微沟道的复制精度优于95.6%,片上3点的均匀性为98.0%.Ultrasonic imprinting is a new fabrication method for forming micro structures on thermo- plastic substrates with the advantages of short processing time and small deformation of substrate. How- ever, its application is limited in large area imprinting due to the nonuniformity of micro structures. The ultrasonic imprinting formation of micro-channels of microfluidic chip is taken as an example, and orthogonal design and simulation using finite element method are introduced to study the influence of ultrasonic imprinting parameters on replication accuracy and uniformity. The results show that the uni- formity can be improved by optimizing ultrasonic imprinting force, ultrasonic amplitude and ultrasonic time, and the ultrasonic imprinting force is the most important factor to replication accuracy and unifor- mity. After the optimized parameters are applied on the PMMA substrate with the area of 48 mm × 32 mm, replication accuracy and uniformity of three points can reach 95.6% and 98.0%, respectively.

关 键 词：微流控芯片 超声波压印 正交实验 

分 类 号：TN492[电子电信—微电子学与固体电子学]