陶瓷球表面类金刚石碳膜均匀沉积机构设计及运动仿真  

Mechanism design and simulation to uniformly deposit diamond-like carbon films on ceramic ball surface

作　　者：张传伟[1] 荆翠妮[1] 古乐[1] 马欣新[2] 

机构地区：[1]哈尔滨工业大学机电工程学院,哈尔滨150001 [2]哈尔滨工业大学先进焊接与连接国家重点实验室,哈尔滨150001

出　　处：《中国科技论文》2012年第8期598-602,共5页China Sciencepaper

基　　金：国家自然科学基金资助项目(50875058);广东省科技计划项目(2010A070500002);广东省教育部产学研结合项目(2010B090400444);广东省国际合作项目(2010B050900003)

摘　　要：在Si3N4陶瓷球表面沉积低摩擦因数的类金刚石碳膜,可以进一步降低陶瓷球轴承的摩擦因数。为了在陶瓷球表面均匀沉积类金刚石碳膜,设计了三沟道单自转盘和三自转盘两种镀膜机构,并且对陶瓷球在工装中的运动进行了仿真,在此基础上讨论了两种机构的镀膜均匀性。三沟道单自转盘镀膜机构的镀膜均匀性较好,该机构能在陶瓷球表面沉积均匀的类金刚石碳膜。The friction coefficient of a bearing with Si3N4 ceramic balls can be reduced by depositing a diamond-like carbon （DLC） film on the ceramic ball surface. Two mechanisms of a single tumtable with three raceways and three turntables are designed to tmifomaly deposit a DLC film on the cerdmic ball surface. The movement of ceramic balls in the two mechanisms was simulated, and the deposition uniformity was discussed. The simulation result indicates that the DLC film can be uniformly deposited on the ceramic ball surface using the single-turntable mechanism The measurement of DLC films deposited on ceramic balls confirms the simulation result

关 键 词：轴承 摩擦 沉积 碳膜 陶瓷材料 机械设计 计算机仿真 

分 类 号：TH133.331[机械工程—机械制造及自动化]