月球表面环境对Mo/Si多层膜光学特性的影响  

Influence of Lunar Surface Environment on the Optical Characteristic of the Mo/Si Multilayer

作　　者：刘震[1] 高劲松[1] 陈波[2] 王彤彤[1] 王笑夷[1] 申振峰[1] 陈红[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室,吉林长春130033 [2]中国科学院长春光学精密机械与物理研究所空间光学研究一部,吉林长春130033

出　　处：《光学学报》2012年第9期303-308,共6页Acta Optica Sinica

基　　金：国家自然科学基金(10878008;40774098)资助课题

摘　　要：研究了月球表面高温、强辐射的空间环境下Mo/Si多层膜的热稳定性和辐照稳定性。Mo/Si多层膜采用磁控溅射法镀制,将制备好的多层膜在100℃和200℃高温下加热,利用激光等离子体反射率计和X射线衍射仪(XRD)对加热前后的多层膜进行了测量。结果显示在200℃以内,多层膜反射率和中心波长没有显著变化,表现出良好的热稳定性。利用Monte Carlo方法模拟了质子在多层膜内造成的缺陷的分布和浓度分布。模拟显示,能量大的质子沉积在多层膜内部,造成的缺陷也集中在多层膜内部。用能量为60keV,剂量分别为3×1012 cm-2和3×1014 cm-2的质子对Mo/Si多层膜进行辐照实验。发现多层膜内部出现了烧蚀损伤缺陷及节瘤缺陷。结果表明能量相同时,辐照剂量越大对多层膜反射率影响越大。The thermal stability and irradiation stability of the Mo/Si multilayer in the high temperature and strong radiation environment of the lunar surface are analyzed. The Mo/Si multilayers are measured by hard X-ray diffractometer （XRD） and laser plasma reflectometer （LPR） before and after heating （in a vacuum chamber） at 100 ℃ and 200 ℃. The results show that there is almost no change in the reflectivity and central wavelength of the Mo/Si multilayer. The distribution of the defects and its density in the Mo/Si multilayer is simulated by Mote Carlo method. It shows that the protons and the defects concentrate in the inner of the multilayer with higher energy protons. The Mo/Si multilayers are irradiated by protons with the energy of 60 keV and the dose 3 × 10^12 cm 2 and 3 × 10 14 cm-2 respectively. The erosion defects and nodule defects are observed in the multilayer after irradiation by protons. The results show that the influence on the Mo/Si multilayers is proportional to the dose of the protons with the same energy.

关 键 词：薄膜 多层膜 热稳定性 辐照稳定性 反射率 等离子体层 

分 类 号：O484.41[理学—固体物理]