超导Josephson隧道结的制备工艺及性能改善  

SUPERCONDUCTING JOSEPHSON TUNNEL JUNCTION FABRICATION PROCESS AND PERFORMANCE IMPROVEMENT

作　　者：翟计全[1] 常俊杰[1] 许伟伟[1] 朱冉[1] 吉争鸣[1] 陈健[1] 

机构地区：[1]南京大学超导电子研究所,南京210093

出　　处：《低温物理学报》2012年第5期333-336,共4页Low Temperature Physical Letters

基　　金：国家自然科学基金(批准号:61027008);国家重点基础研究发展计划(批准号:2011CBA00107;2011CBA00202)资助课题~~

摘　　要：超导Josephson隧道结是实现超导量子比特的基本元件.本文介绍了一种利用电子束曝光技术和电子束斜蒸发技术相结合的方法来制备铝超导Josephson隧道结.这种方法工艺简单,通过一次光刻就可完成;而且可以通过调节下层光刻胶厚度、斜蒸发角度、悬空桥区宽度等参数可以有效地控制隧道结的面积大小;此外,本方法通过采用不对称电极结构有效地改善了隧道结的漏电流特性,满足了制备超导量子比特的要求.Superconducting Josephson tunnel junction is the basic component of superconducting qubits. This paper describes a technique using electron beam lithography and electron beam oblique evaporation technology combined to fabricate aluminum superconducting Josephson tunnel junctions. This method is simple can be completed through one photolithography. And the size tunnel junctions can be effectively controlled by adjusting the thickness of lower photoresist, oblique evaporation angle and the width of floating bridge. In addition, the tunnel junction leakage current performance is effectively improved by the use of asymmetric electrode structure and meet the requirements of superconducting qubit quite well.

关 键 词：Al AL2O3 Al隧道结 双层光刻胶 悬空掩膜结构 斜蒸发 

分 类 号：TN605[电子电信—电路与系统] O511[理学—低温物理]