不同锻造变形量对管状溅射靶材晶粒组织的影响  

THE EFFECT OF THE GRAIN STRUCTURE ON FORGING DEFORMATION OF THE TUBULAR SPUTTERING TARGET

作　　者：李晶[1] 王锦[1] 安耿[1] 张常乐[1] 刘仁智[1] 

机构地区：[1]金堆城钼业股份有限公司技术中心,陕西西安710077

出　　处：《中国钼业》2012年第4期48-51,共4页China Molybdenum Industry

摘　　要：选用常规钼粉作为原料,采用锻造加工方式加工出一定规格的管状溅射靶材,在不同退火温度下观察晶粒组织,得出变形量为80%、1 100℃工艺下加工出的溅射靶材晶粒大小均匀,组织性能较好,符合溅射靶材对晶粒度的要求。Using conventional molybdenum powder as a raw material, tubular sputtering target with certain specifications was processed by forging. Observing grain structure in the different annealing temperatures, it is obtained that uniform grain size can be gotten with deformation 80%, 1 100 ℃, and the microstructure and properties are in line with the requirement of the sputtering targets on grain size.

关 键 词：钼溅射靶 管状 组织 晶粒 

分 类 号：TN305.92[电子电信—物理电子学]