非共振光声红外气体传感器结构参量分析  

Analysis of Structural Parameters of Nonresonant Photoacoustic Gas Sensor

作　　者：管人宝[1] 何秀丽[1] 高晓光[1] 赵玲[1] 李建平[1] 贾建[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100190

出　　处：《仪表技术与传感器》2012年第8期1-3,21,共4页Instrument Technique and Sensor

基　　金：国家高技术研究发展计划(863计划)资助项目(2009AA04Z328)

摘　　要：非共振光声红外气体传感器在气体检测领域有很好的应用前景。对基于MEMS红外光源的非共振光声红外气体传感器进行了一维模拟,分析了光声腔及红外吸收光路结构对传感器性能的影响;计算了吸收腔气体压强变化量与吸收腔长度及调制频率的关系,研究了光路内壁反射率、样品气室长度对样品气体红外吸收效率的影响。简化的理论分析和计算结果,可以为非共振光声红外气体传感器的结构设计提供参考。Photoacoustic spectroscopy（PAS） is a very attractive technique for gas detection.The one-dimension simulation of the nonresonant photoacoustic gas sensor with MEMS infrared emitter was presented,and the effect of the nonresonant photoacoustic chamber and the optical path on the sensor performance was theoretically analyzed.The relationship among the pressure in the photoacoustic chamber,the chamber length and the modulation frequency and the relationship among the reflectivity,the optical path length and the optical absorption efficiency of sample gas were calculated.The theoretical results present a reference for the design of the nonresonant photoacoustic gas sensor.

关 键 词：非共振光声 红外气体传感器 MEMS光源 吸收效率 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]