尺寸效应对TiC/α-C∶H涂层织构行为的影响  

Grain-size effect on the preferred orientation of TiC/α-C∶H thin films

作　　者：苏亚东[1] 王向明[1] 王华明[2] 郑伟涛[3] 

机构地区：[1]中航工业沈阳飞机设计研究所,辽宁沈阳110035 [2]北京航空航天大学材料科学与工程学院,北京100191 [3]吉林大学材料科学与工程学院,吉林长春110032

出　　处：《功能材料》2012年第18期2536-2540,2545,共6页Journal of Functional Materials

基　　金：国家安全重大基础研究资助项目(613XXX)

摘　　要：利用磁控溅射法制备了TiC/α-C∶H纳米复合涂层尺寸效应,并对涂层择优取向的影响进行了研究。通过改变涂层中的C含量来调节晶粒尺寸,发现晶粒尺寸对晶粒的择优取向有着重要影响。随着晶粒尺寸减小,TiC的择优取向从面心立方(111)向(200)转变。这种择优取向的尺寸依赖效应可以用热力学来解释。通过计算与尺寸相关的吉布斯自由能解释了尺寸效应与涂层择优取向的关系。The grain-size effect on the preferred orientation was revealed in TiC/α-C∶H nanocomposite films grown by magnetron sputtering,in which the grain size of TiC can be adjusted through changing C content in the films.The finding showed that the preferred orientation of the films was significantly affected by the grain size,and the crystallographic orientation changed from face-centered cubic（fcc） TiC（111） to（200） as the grain size of nanocrystallite TiC decreased from about 22.3 to about 4.7nm.This size-dependent preferred orientation was explained via thermodynamic calculations,from which the size-dependent Gibbs free energies were found to be a key factor that controled the texture development in the thin films if grain size in the films was sufficient small.

关 键 词：TiC/α-C∶H纳米复合薄膜 尺寸效应 择优取向 

分 类 号：TB332[一般工业技术—材料科学与工程]