针对不同类型热敏MEMS器件的高性能前置放大器设计  

Design of high performance pre-amplifier for different types of MEMS thermal sensors

作　　者：宋冬雪[1] 薛晨阳[1] 王玮冰[2] 何鑫[2] 孟如男 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 [2]中国科学院微电子研究所微电子器件与集成技术重点实验室,北京100029

出　　处：《传感器与微系统》2012年第9期75-78,82,共5页Transducer and Microsystem Technologies

基　　金：国家科技重大专项基金资助项目(2011ZX02507)

摘　　要：针对不同应用的热敏MEMS器件的界面电路设计高性能放大器,提出建立与CMOS工艺兼容的热敏MEMS器件前置放大器的IP库的概念。通过提取相关热敏器件的典型参数,设计低功耗、低噪声且分别符合精度和速度等特殊要求的前置放大器,对3种不同结构的放大器进行分析研究,并利用Cadence软件,基于CSMC 0.5μm标准CMOS工艺库进行设计仿真。仿真结果表明:3种不同结构的放大器可以用于相应性能要求的热敏MEMS器件中。Aiming at various application interface circuits of MEMS thermal sensors, high performance preamplifiers is designed. The concept of setting up IP library of pre-amplifiers for CMOS-process-compatible MEMS thermal sensors is proposed. By extracting related devices typical parameters, pre-amplifiers which is low-power, low-noise and meet special requirements such as precision and speed are designed. Three different structures of amplifiers are analyzed based on CSMC 0.5 μm CMOS standard process library are designed and simulated by Cadence software. Simulation results show that three different structures amplifier can be used in MEMS thermal sensors for relevant performance requirements.

关 键 词：热敏MEMS器件 前置放大器 CMOS 

分 类 号：TN492[电子电信—微电子学与固体电子学]