X射线凸度仪中散射信号的物理模型与解析计算研究  

The Research on a Physical Model and an Analytical Method of Scatter Signal in X-ray Profile Gauge

作　　者：文贤飞[1] 尹在哲[1] 苗积臣[1] 

机构地区：[1]清华大学核能与新能源技术研究院,北京100084

出　　处：《核电子学与探测技术》2012年第6期635-637,共3页Nuclear Electronics & Detection Technology

基　　金：国家自然科学基金项目(10875068);北京市科技计划资助项目(Z080903027508)

摘　　要：在各种凸度检测技术中,射线法能够适应恶劣的生产环境、测量精度高等一些优点使它成为研究的主流方向[1]。散射是影响射线法凸度检测精度的一个重要因素,关于散射的研究是该技术研发的重要环节,也是研究的难点[1]。通过建立物理模型,使用解析法进行散射校正,与Monte Carlo模拟结果对比,得到了理想的结果。There are more active researches on X-ray profile gauge with some useful properties including being more adaptive to harsh workplace and more precise when compared to other profile gauges.However,Scatter is a factor that degrades the measurement precision of X-ray profile gauge,the study about scatter correction is an indispensable step for the technology.We take an analytical method to correct it after making a physical model.The results obtained by this approach agree well with those using Monte Carlo simulation.

关 键 词：凸度仪 散射 物理模型 解析法 蒙特卡洛方法 

分 类 号：TL99[核科学技术—核技术及应用]