高g光学微腔加速度计的结构设计  

Design the Structure of High-g Optical Microcavity Accelerometer

作　　者：王晓倩[1] 李鹏[1] 孟祥然[1] 徐鹏飞[1] 冯薪霖[2] 薛晨阳[1] 闫树斌[1] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室电子测试技术国家重点实验室,太原030051 [2]山西大学物理电子工程学院,太原030006

出　　处：《传感技术学报》2012年第8期1049-1053,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(91123036,61275166,50975266,61178058);山西省自然科学基金项目(2010011003-2)

摘　　要：针对高量程加速度测试需求,提出了一种基于光弹效应的新型光学加速度传感器;利用MATLAB软件和时域差分有限元(FDTD)对微环谐振腔悬臂梁加速度计的结构进行优化设计,详细分析了波导传输模态,传感器灵敏度以及工作带宽与波导尺寸、微悬臂梁尺寸的关系。在优化设计的基础上,通过ANSYS软件对悬臂梁的抗冲击性能进行仿真,其抗冲击可达104gn,灵敏度为10-2pm/gn,能有效满足高冲击、强烈振动场合的特殊测试要求,可以应用于侵彻系统,并为集成小型化高灵敏抗冲击微光机电系统(MOEMS)传感器提供理论参考。To meet a high g accelerometer test requirements in special situation,a new optical accelerometer structure based on the photo-elastic effect was designed.The micro-ring resonator cantilever accelerometer structure was designed and optimized by MATLAB software and the finite difference time domain software.We get the detailed analysis of the waveguide transmission mode,sensor sensitivity,and operating bandwidth with the relationship between waveguide dimensions and the size of micro-cantilever.Based on the optimal design,we also get the shock resistance by ANSYS software,which is up to 104 gn,a sensitivity of 10-2pm/gn.So the designed accelerometer can effectively meet the special test requirements such as high impact and strong vibration,and it can be applied to the penetration system.And it is also providing a theoretical reference for integrated high-sensitivity small impact MOEMS sensors.

关 键 词：光弹效应 微环谐振腔 加速度计 悬臂梁 

分 类 号：TN256[电子电信—物理电子学]