一种高分辨率的光纤定位单元定位精度的测量装置  

A High-resolution Measurement Device for Detecting the Positioning Accuracy of the Optical Fiber Positioner

作　　者：徐建雷[1] 顾永刚[2] 翟超[2] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,合肥230027 [2]中国科学技术大学工程与材料科学实验中心,合肥230027

出　　处：《机电一体化》2012年第9期54-57,70,共5页Mechatronics

基　　金：国家自然科学基金项目(编号:11103018)

摘　　要：目前对光纤定位单元定位精度的检测所使用的测量手段是摄影测量,由于被测光纤的孔径非常小,使得这种测量方法的分辨率不高。该文提出了一种新的测量方法,检测装置由显微镜、CCD相机、二维精密移动平台组成。被测光纤通过显微镜放大成像于CCD中,通过对CCD所拍摄照片的实时处理,建立位置反馈机制,实时操控二维精密移动平台追随光纤运动,光纤在运动中始终成像于CCD视场中心,通过读取移动平台坐标的变化来表征光纤移动的位置变化。实验结果表明,该套测量系统的分辨率达到了0.1μm,重复定位精度1.5μm,实现了高精度的检测要求。Photogrammetry is currently used to detect the positioning accuracy of the optical fiber positioner, but it cannot achieve high precision because of the small diameter of the fiber. So, a new measurement device, which mainly contained microscope, CCD camera and two-dimensional precision mobile platform, was established in this paper. The photo of the fiber was took by the CCD in a magnified way through the microscope, and processed to build the position feedback mechanism in real time. Then the mobile platform was controlled to track the fiber, and the fiber was always kept to locate in center of the CCD image. Finally, the position changes of the moving fiber could be obtained by the coordinates of the mobile platform. The experimental results demonstrate that the resolution of this measurement device is 0. 1μm and the accuracy of repeat positioning is 1.5μm. The measurement device could satisfy the testing requirement.

关 键 词：光纤定位 CCD 移动平台 光学显微镜 定位精度 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]