一种长波红外宽光谱长波通滤光片的设计与镀制  

Design Optimization and Fabrication of Infrared Broad-Band Long-Wavelength Pass Filter

作　　者：叶自煜[1] 张佰森[1] 朱忠奎[1] 

机构地区：[1]兰州空间技术物理研究所空间环境材料行为与评价技术重点实验室,兰州730000

出　　处：《真空科学与技术学报》2012年第9期830-833,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：长波红外宽光谱长波通滤光片是光谱成像技术中重要的光学元件。本文研究了一种宽光谱长波通滤光片优化设计,论述了设计长波红外宽光谱长波通滤光片的设计原则和方法。根据等效折射率理论,以周期性对称膜系为基础,使用压缩透射区内波纹幅度的部分膜层优化方法,设计了满足性能指标要求的长波红外长波通滤光片。经过优化,所设计的膜系高透射波段内的平均透射率大于90%,高透射区内的最低透射率也高于85%。截止波段内的平均透射率小于1%,截止区内的最高透射率也低于5%。研究表明,部分膜层优化方法设计的膜系,膜层结构简单,有利于膜层厚度的监控,既能克服全自动优化方法给工艺上带来的困难,又弥补了解析法设计膜系时不能调整光谱特性的不足。A novel type of infrared broad-band long-wavelength pass filter,widely used in remote sensing of natural resources and environment,was developed.The film thickness was optimized based on the equivalent-index method to reduce the transmittance band ripple.The spectrum of the design-optimized and fabricated filter has a fairly flat ripple and high transmittance,with the average and minimum transmission ratios over 90% and 85%,respectively,in the pass band.Its average and minimum transmission ratios were found to be below 1% and 5%,respectively,in the rejection band.The advantages of the design optimization include an easily monitoring the film thickness,simplification of the film growth,and removing the obstacle of spectral adjustment in the filter design in analytical method.

关 键 词：红外 长波通滤光片 薄膜设计 优化 

分 类 号：O484.4[理学—固体物理]