软X射线波段透射光栅检测系统  

Transmission Grating Measuring System in X-ray Wavelength

作　　者：李旭[1,2] 何飞[1,2] 陈波[2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033 [2]中国科学院研究生院,北京100039

出　　处：《长春理工大学学报（自然科学版）》2012年第3期50-53,共4页Journal of Changchun University of Science and Technology(Natural Science Edition)

基　　金：国家自然科学基金(No.40774098)

摘　　要：目前,透射光栅被广泛地应用于软X射线波段光谱测量当中。但由于在软X射线波段几乎所有材料都有非常明显的吸收,因此利用传统方法很难在该波段对透射光栅进行检测。为了检测透射光栅在软X射线波段的光谱分辨本领,我们基于掠入射理论,采用凹面反射光栅单色仪配X射线CCD相机组成一套软X射线波段透射光栅检测装置。首先利用He空心阴极光源的30.38nm、53.70nm和58.43nm三条线谱对透射光栅检测系统进行波长标定。然后更换激光等离子体光源,测量并得到了金自支撑式透射光栅在6.67nm和9.10nm两个波长位置上一级衍射位置和一级衍射光谱线宽度,利用半宽度法计算并得出在以上两个波长位置时被测透射光栅一级谱所能分辨的最小波长差为2.38nm和2.05nm。实验结果表明该投射光栅检测系统完全可以应用于软X射线波段透射光栅检测工作当中。Transmission gratings have been widely used in spectrummeasurements in soft X-ray wavelength.But it is too difficulty to measure the transmission grating in traditionmethod . Because the most of materials have much absorbtion in X-ray wavelength.A transmission grating measuring system that is composed by concave reflective gratingmonochromator and X--ray CCI） camera is setup to test the spectrum resolution of transmission grating in soft X-ray wavelength. Three lines of 30.38nm, 53.70nm and 58.43nm from Helium hollow cathode source are used first to calibrate the wavelength of the transmission gratingmeasuring system. Then the first-order relative spectrum resolution of the golden self-support- ing type transmission grating at 6.67nm and 9.10nm are measured with laser plasma source. According to the experimen- tal results, using half-wldthmethod, the distinguishableminimum wavelength differences of the first-order spectra of the golden lransmission grating aremeasured to be 2.38nm and 2.05nm respectively at the two wavelengths. The results show that this transmission grating is totally applicable in spectrameasuring which in soft X-ray wavelength.

关 键 词：透射光栅 检测系统 空心阴极光源 软X射线 

分 类 号：TH741.6[机械工程—光学工程]