统计过程控制(SPC)技术在紫外像管制作中的应用  

Application of Statistic Process Control(SPC) Technology in Ultraviolet Image Intensifier Fabrication Process

作　　者：耿雨升[1] 高永斌[1] 潘书山[2] 

机构地区：[1]南京电子器件研究所,南京210016 [2]中国人民解放军空军驻七七二厂军事代表室,南京210019

出　　处：《光电子技术》2012年第3期210-216,共7页Optoelectronic Technology

摘　　要：采用统计过程控制(SPC)技术对关键工序进行监控是保持产品生产线稳定、减少质量波动的有效方法。可以提高产品的成品率和可靠性。在现有工序状态下,通过采集封接温度、真空度等数据,计算和分析关键工序的工序能力指数,进行工艺调整和改进,直到工序能力指数Cpk≥1.33。通过选择控制图,对数值进行监控。若发现工序失控时,分析原因并及时采取纠正预防措施,就能有效保证工艺的一致性和稳定性,提高工艺成品率。Statistic process control（SPC） technology to monitor the key process is a useful tool to keep the stability of the process line,eliminating the quality volatility.It can be used to improve yield and reliability of the devices.The sequences are： sampling the sealing temperature and vacuum data under the current condition,calculating and analyzing the process capability index,providing with process adjustment and improvement to the Cpk≥ 1.33 reached.The right control charts are selected to monitor the temperature and value.when the process is found to be unstable,SPC can help analyse the reasons and take timely corrective and preventive action,thus the process consistency and stability are kept for the process yield.

关 键 词：紫外 像增强管 统计过程控制技术 工序能力指数 控制图 

分 类 号：TN23[电子电信—物理电子学]