基于哈特曼传感器的激光波前分布测量技术  

Measurement of laser beam wavefront distribution based on hartmann sensor

作　　者：王国星[1] 马冲[2] 

机构地区：[1]中北大学机电工程学院,山西太原030051 [2]中国计量科学研究院,北京100013

出　　处：《中国测试》2012年第5期22-24,28,共4页China Measurement & Test

基　　金：国家科技部科技支撑计划项目(2006BAF06B05)

摘　　要：激光波前分布作为ISO新列入的衡量激光光束质量的重要参数,对其有效、准确地测量显得十分重要。根据哈特曼波前测量原理,详细介绍了基于哈特曼传感器的激光波前分布测量装置、哈特曼传感器波前斜率测量方法和常用波前重构算法,引入一种定标哈特曼传感器针孔阵列与CCD间距的方法,分析定标实验数据及使用已定标的哈特曼波前分析仪测量波前的实验结果。实验证明定标方法可靠有效。It is essential to accurately measure the laser beam wavefront distribution, which is a key parameter listed by IS0 to characterize the laser beam propagation properties. The paper specified the methods for measuring the laser beam wavefront distribution with Hartmann sensor, which includes measurement equipment, test principle of wavefront slope and wavefront reconstruction algorithm. Furthermore, a method to determine the distance between pinholes array and CCD in the Hartmann sensor was introduced, and the wavefront measurement results using the calibrated Hartmann sensor are analyzed. The experiment results indicate that the method to determine the distance between pinholes array and CCD is credible and accurate.

关 键 词：激光计量 激光光束质量 激光波前 哈特曼传感器 自适应光学 

分 类 号：TN247[电子电信—物理电子学] TP212.2[自动化与计算机技术—检测技术与自动化装置]