温度对正压漏孔校准装置本底漏率影响的研究  

RESEARCH ON EXPERIMENTATION OF BACKGROUND LEAKAGE CAUSED BY TEMPERATURE OF PRESSURE LEAK CALIBRATE APPARATUS

作　　者：冯焱[1] 张瑞芳[1] 盛学民[1] 董猛[1] 

机构地区：[1]兰州空间技术物理研究所,甘肃兰州730000

出　　处：《真空与低温》2012年第3期154-159,共6页Vacuum and Cryogenics

基　　金：表面工程技术重点实验室基金项目(项目编号:9140C5403021201)

摘　　要：在实验室条件下,由于温度变化引起正压漏孔校准装置本底漏率变化是影响正压漏孔校准下限的主要因素,因此正压漏孔校准装置采用水浴恒温技术,采取主动恒温与被动恒温相结合的方式进行恒温,以减小因温度变化对本底漏率的影响。通过实验研究,采取恒温措施后,本底漏率降低到1.36×10-9Pa×m3/s,正压漏孔的测量下限可以扩展到2.667×10-8Pa×m3/s,延伸了正压漏孔标准的下限。On laboratory conditions, background leakage caused by temperature was one of the important factors influence cal- ibration of pressure leak consequently, the constant temperature water bath of the calibration apparatus has been used, the method of initiative and passiveness were combined to keep constant temperature, to decrease the background leakage caused by temperature , through the research on experimentation, background leakage was decreased to the grade of 1.36×10-9 Pa×m3/s when constant temperature been used , the measurement＇s lower limiting of pressure leak extended to 2. 667×10-8 Pa× m3/s.

关 键 词：正压漏孔 恒温实验 水浴恒温 本底漏率 

分 类 号：O743[理学—晶体学]