BaTiO_3薄膜的Sol-gel法制备及其介电特性研究  

Preparation of Barium Titanate Thin Film by the Sol-gel Technique and Study on Its Dielectric Properties

作　　者：沈良[1] 宋世庚[1] 贾锐[1] 陶明德[1] 

机构地区：[1]中国科学院新疆物理研究所,乌鲁木齐830011

出　　处：《硅酸盐通报》2000年第3期21-23,共3页Bulletin of the Chinese Ceramic Society

摘　　要：以钛酸四丁酯和乙酸钡为主要原料 ,以乙二醇独甲醚为溶剂 ,采用溶胶凝胶法成功地配制出了BaTiO3 溶胶 ,溶胶清晰稳定 ,保存时间长。并用XRD分析了沉积在Si(1 0 0 )低阻硅片上的薄膜的结构 ,发现薄膜在 60 0℃时结晶状态已良好。文中同时对薄膜的介电性质进行研究 ,并讨论了退火温度对薄膜介电性质的影响。BaTiO 3 thin film was prepared on Si(100) substract by sol gel technique using ethylene glycol monomethyl ether as solvent barium acetate and titanium tetrabutoxide as precursor. The structural analysis of the thin film deposited on the Si(100) substract has been made by means of XRD.It showed that the BaTiO 3 thin film has good crstallization at 600℃.Its dielectric property and effect of the annealing temperature on the property were also studied and discussed in this paper.

关 键 词：溶胶-凝胶法 介电性质 钛酸钡薄膜 

分 类 号：TQ132.35[化学工程—无机化工] O484.42[理学—固体物理]