聚酰亚胺衬底柔性非晶硅薄膜电池集成串联组件的研究  

Flexible series-integrated a-Si thin film cell modules on polyimide substrate

作　　者：陈亮[1] 马宁华[1] 陈臻纯[1] 周丽华[1] 蒋帅[1] 王小顺[1] 叶晓军[1] 张梦炎[1] 

机构地区：[1]上海空间电源研究所,上海200245

出　　处：《光电子．激光》2012年第10期1885-1889,共5页Journal of Optoelectronics·Laser

基　　金：上海市科技成果转化与产业化项目(12dz1201100);国家"863"(2011AA050503)资助项目

摘　　要：研究了柔性Si基薄膜太阳电池集成串联组件的制备与关键技术。对导电栅线在柔性薄膜太阳电池集成串联组件中的重要性进行了模拟计算,对柔性薄膜太阳电池激光刻蚀进行了理论分析与实验优化,并对柔性Si基薄膜太阳电池集成串联组件进行了设计与研制。在聚酰亚胺(PI)衬底上,通过卷对卷磁控溅射与卷对卷等离子增强化学气相沉积(PECVD)依次沉积复合背反射层Ag/ZnO、Si基薄膜层和透明导电膜层,采用激光刻蚀与丝网印刷工艺相结合实现集成串联,制备了柔性非晶Si(a-Si)薄膜太阳电池集成串联组件。柔性单结集成串联组件有效面积转换效率达到了4.572%(AM0),开路电压Voc=5.065V,填充因子FF=0.552。Flexible series-integrated a-Si thin film cell modules on polymer substrate are studied and fabri- cated. The importance of metal finger grids on ITO in flexible monolithic a-Si modules is discussed and calculated. Laser scribing of a-Si thin film solar cell on polyimide is discussed and optimized. On polyim- ide substrate, the back reflector Ag/ZnO is sputtered by roll-to-roll sputtering technique, the n-i-p a-Si is deposited by roll-to-roll plasma enhanced chemical vapor deposition （PECVD） technique, and the ITO layer is sputtered by roll-to-roll sputtering technique with a mask. At last,monolithic series integration is obtained by laser scribing and screen printing, and the monolithically series-connected single-junction modules reach the initial aperture area solar energy conversion efficiencies of 4. 572 % at AM0 spectrum, with open-circuit voltage of Voc =5. 065 V and filling factor fo FF=0. 552.

关 键 词：柔性薄膜太阳电池 集成串联组件 激光刻蚀 丝网印刷 

分 类 号：TN304[电子电信—物理电子学]