高产能晶体硅太阳能电池制绒设备及工艺研究  

Research of Equipment by Cells High Productivity and Technology for Crystalline Silicon

作　　者：毛朝斌[1] 李克[1] 李健志[1] 林伯奇[1] 陈特超[1] 

机构地区：[1]中国电子科技集团公司第四十八研究所国家光伏装备工程技术研究中心,湖南长沙410111

出　　处：《电子工业专用设备》2012年第9期11-13,17,共4页Equipment for Electronic Products Manufacturing

摘　　要：制绒工艺作为晶体硅太阳能电池生产的重要环节,电池厂商在要求保证工艺质量的前提下,希望能扩大单台设备的产能。介绍了一种用于太阳能电池制绒设备及该系统中关键部件制绒槽和移载机械手。该系统结构简单,控制效果良好,通过对工艺的研究该系统能满足100 MW生产线的生产要求。The system of texturing as a crystal silicon cells production of an important link,the crystalline silicon cells manufacturer hope to be able to enlarge the capacity of single equipment in the guarantee process quality.The system of texturing equipment has been introduced in this paper,which is used for solar cell texturing process.The texturing tank and mechanical arm has been introduced emphasis in this paper.This system is simple in structure and good control result.It can satisfy production requirements for the 100WM productivity.

关 键 词：制绒设备 晶体硅太阳能电池 高产能 

分 类 号：TN305[电子电信—物理电子学]